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Metrology
Step Height Measurement
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88
Veeco/DI Dimension 7000 Atomic Force Microscope (AFM)
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87
Veeco/DI Dimension 3100 Atomic Force Microscope (AFM)
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86
Tencor P-17 stylus surface profiler
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85
Tencor P-16+ stylus surface profiler
ÆǸÅÁß
84
Tencor P-16 Step Height Measurement System
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83
Tencor P-15 Step Height Measurement System
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82
Tencor P-11 Step Height Measurement System
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81
Tencor P-10 Step Height Measurement System
ÆǸÅÁß
80
TENCOR FLX-2320
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79
Tencor / Prometrix RS 35 4PP
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78
SSM 530 HG-CV System for EPI resistivity measurement
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77
SSM 5130 HG-CV System for EPI resistivity measurement
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76
SSM 495 HG-CV System for EPI resistivity measurement
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75
SSM 2000 NANOSRP
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74
SSM 2000
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73
SSM 150 Auto Spreading Resistance Probe (ASRP)
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72
Semilab WT-2020( ¥ì-PCR) Carrier life time measurement
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71
Semilab WT-2000PVN( ¥ì-PCD) Carrier life time measurement
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70
SDI/SEMILAB FAaST 230 Non-contact CV/IV Measurement System
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69
Olympus MX61F microscope & AL110-LMB86 autoloader
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68
Nikon LV 150 Mcroscope
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67
Nikon Eclips L200 + NWL641 (Scope & Autoloader)
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66
Nanometrics Nanospec 6100UV Thin Film Thickness Measurement
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65
Nanometrics Nanospec 6100
ÆǸÅÁß
64
Nanometrics Nanospec 4150 Film Thickness Measurement
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63
Nanometrics Nanospec 2100 Thin Film Thickness measurement
ÆǸÅÁß
62
Nanometrics Nanospec 210 Thin Film Thickness measurement
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61
N&K OptiPrime - CD
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60
N&K 5300 CD Trench Depth & Thin film thickness Measurement
ÆǸÅÁß
59
N&K 5000 CD Trench Depth & Thin film thickness Measurement
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58
N&K 1700-RT Metrology system
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57
MCV 2500 HG-CV System for EPI resistivity measurement
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56
LEICA INS10
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55
KLA-Tencor Surfscan 6200 particle counter
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54
KLA-Tencor OSA 6100 Optical Defect Inspection
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53
KLA-Tencor OSA 6100 Optical Defect Inspection
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52
KLA-Tencor Candela CS20 Optical Defect Inspection
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51
KLA-Tencor Candela CS20 Optical Defect Inspection
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50
KLA-Tencor Candela CS10V Optical Defect Inspection
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49
KLA-Tencor Candela 8620 Optical Defect Inspection
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48
KLA-Tencor Candela 8620 Optical Defect Inspection
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47
KLA-Tencor Candela 8600 Optical Defect Inspection
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46
KLA-Tencor Candela 8600 Optical Defect Inspection
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45
KLA Tencor AIT XP+ (Fusion)
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44
Bio-Rad QS-300 FT-IR (EPI.BPSG,C.O)
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43
BIO-RAD QS-1200 FT-IR
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42
Asyst load port
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41
Asyst load port
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40
Asyst load port
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39
Asyst load port
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[1]
[2]
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31208 TEL: 041-554-6920~1 FAX: 041-554-6922