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Metrology Equipment Sales & Technical Service
- KLA-Tencor(Surfscan 6200,6220,6420,sp1 ・)
- KLA-Tencor(Profiler P-2, P-2H, P-10, P-11, P-20H, ・)
- Prometrix(Rs 35, 50, 55, 75, vp10 ・)
- Bio-Rad(QS 300,408,500 ・)
- SSM Hg CV(490i, 495, 5100, 5130 ・) / SSM 150 / NanoSRP 2000
- ADE 9300/9350/9500/9600 ・
- Thermawave, Rigaku, Nanometrics, N&K(N&K 1700 analyzer)
- Rudolph, Leica / Nikon/Olympus,・
Epitaxial Equipment Sales & Technology Service
- AMAT 7810/7700, G2/G3HT,ASM Epsilon, LPE2061
Diffusion Furnace Sales & Technical Service
- Thermco Horizontal Furnace(HTR 4304, 4504, 4904, 5104, 5204, ・)
Turnkey Base FAB Construction & Servcice
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Measurement & Analysis Service
- Auto Spreading Resistance Profile Analysis ( Junction Depth & Doping Profile )
- N/P Type Measurement
- Thin film Measurement & Analysis
- Particle Measurement on wafer surface (Bare)
- Vertical Structure Analysis (SEM)
*Calibration by certified Standard Reference Material
Software Backup Service
- Software Install & upgrade, data backup service
Board & Parts Repair Service
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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