http://jenesisequipment.com
Tel:+82-41-554-6920~1, Fax:+82-41-554-6922
E-mail: chj@jenesis.co.kr
#3, Tongjeong 3-ro,Dongnam-gu,CheonAn-Si,ChoongNam,South Korea 31208
JENESIS EQUIPMENT LIST
No. Tool's Name Maker Model Vintage W/F size
1 AMC 7700 EPI Reactor APPLIED MATERIALS AMC 7700 6
2 AMC 7700 EPI Reactor with Moore Uniformity Kit APPLIED MATERIALS AMC 7700 6
3 Asyst load port Asyst IsoPort 2012 12
4 Asyst load port Asyst IsoPort 2004 12
5 Asyst load port Asyst 300FL,S3 STD,KT07 2004 12
6 Asyst load port Asyst 300FL,S3 STD,KT07 2004 12
7 BIO-RAD QS-1200 FT-IR BIO-RAD QS-1200 12
8 BIO-RAD/Accent QS-408M FT-IR BIO-RAD QS-408M 1996 8
9 Fischione 1010 Ion Milling and Polishing System FISCHIONE Model 1010 0
10 Hitachi S-5500 In-lens FE SEM HITACHI S-5500 0
11 Hitachi SEM S-4160 HITACHI S-4160 2000 8
12 Hitachi SEM S-5000 HITACHI S-5000 1996 0
13 KLA Tencor AIT FUSION (AIT XP+) KLA TENCOR AIT FUSION (AIT XP+) 2000 8
14 KLA-Tencor Archer 10XT+(AIM+) Overlay Metrology KLA TENCOR Archer 10XT+ (AIM+) 2006 12
15 KLA-Tencor Candela 8600 Optical Defect Inspection KLA TENCOR Candela 8600 2011 8
16 KLA-Tencor Candela 8600 Optical Defect Inspection KLA TENCOR Candela 8600 2011 6
17 KLA-Tencor Candela 8620 Optical Defect Inspection KLA TENCOR Candeal 8620 2012 8
18 KLA-Tencor Candela 8620 Optical Defect Inspection KLA TENCOR Candela 8620 2011 8
19 KLA-Tencor Candela CS10V Optical Defect Inspection KLA TENCOR CS10V 2009 4
20 KLA-Tencor Candela CS20 Optical Defect Inspection KLA TENCOR CS20 2006 6
21 KLA-Tencor Candela CS20 Optical Defect Inspection KLA TENCOR CS20 2006 6
22 KLA-Tencor OSA 6100 Optical Defect Inspection KLA TENCOR OSA6100 2005 6
23 KLA-Tencor OSA 6100 Optical Defect Inspection KLA TENCOR OSA6100 2006 6
24 KLA-Tencor Surfscan 6200 particle counter KLA TENCOR SFS 6200 1994 8
25 LEICA INS10 NIDEK LEICA INS10 8
26 LEO/KOBELCO LTA-700 Wafer Lifetime Mesurement System LEO/KOBELCO LTA-700 1997 6
27 MCV 2500 HG-CV System for EPI resistivity measurement SDI/SEMILAB MCV2500 2010 12
28 Micro manupulator Manual Probe Station 6400F MICROMANUPULATOR 6400F 8
29 N&K 1700 Trench Depth & Thin film thickness Measurement N&K N&K 1700 6
30 N&K 1700 Trench Depth & Thin film thickness Measurement N&K N&K 1700 8
31 N&K 1700-RT Metrology system N&K 1700RT 2005 0
32 N&K 3700 RT Metrology System N&K N&K 3700 RT 2004 8
33 N&K 5000 CD Trench Depth & Thin film thickness Measurement N&K N&K 5000-CD 2006 8
34 N&K 5300 CD Trench Depth & Thin film thickness Measurement N&K NK5300 2006 12
35 N&K 5700 CDRT Metrology system N&K N&K 5700 CDRT 2006 0
36 N&K 8000 CD Trench Depth & Thin film thickness Measurement N&K N&K Little foot 8000 CD 2007 8
37 N&K OptiPrime - CD N&K OptiPrime - CD 8
38 Nanometrics Nanospec 210 Thin Film Thickness measurement NANOMETRICS 210 8
39 Nanometrics Nanospec 2100 Thin Film Thickness measurement NANOMETRICS 2100 1996 8
40 Nanometrics Nanospec 4150 Film Thickness Measurement NANOMETRICS NANOSPEC 4150 8
41 Nanometrics Nanospec 6100 NANOMETRICS Nanospec 6100 8
42 Nanometrics Nanospec 6100UV Thin Film Thickness Measurement NANOMETRICS NANAOSPEC 6100 2007 8
43 Nanometrics Nanospec 9300 Thin Film Thickness Measurement NANOMETRICS Nanospec 9300 2002 12
44 NIDEK 5" Wafer Autoloader IM-11 NIDEK IM-11 5
45 NIDEK 8" Wafer Autoloader IM-14 NIDEK IM-14 8
46 Nikon Eclips L200 Microscope NIKON Nikon Eclips L200 8
47 Nikon LV 150 Mcroscope NIKON LV150 8
48 Nikon NWL641M Wafer Autoloader NIKON NWL641M 2001 6
49 Olympus MX50A-F Microscope & AL100-LM6 Autoloader OLYMPUS MX50A-F & AL100-LM6 6
50 Olympus MX61F microscope & AL110-LMB86 autoloader OLYMPUS MX61F + AL110-LMB8 8
51 Olympus MX80-F Microscope (up to 300mm wafer) OLYMPUS MX80F 12
52 RIKEN Portable Gas Leak Detector RIKEN GH-202F 2007 8
53 Rudolph/August AXI 930 Macro Inspection System RUDOLPH AXI-930 8
54 Rudolph/August AXI-S Macro Inspection System RUDOLPH AXI-S 8
55 SDI/SEMILAB FAaST 200-SL CV/IV Measurement SDI/SEMILAB FAaST 200 SL 8
56 SDI/SEMILAB FAaST 230 Non-contact CV/IV Measurement System SDI/SEMILAB FAaST 230 8
57 Semilab WT-2000PVN( -PCD) Carrier life time measurement SDI/SEMILAB WT-2000PV 2009 8
58 Semilab WT-2020( -PCR) Carrier life time measurement SDI/SEMILAB WT-2020 2018 8
59 SONIX Quantum 350 Scanning Acoustic Microscopy (SAM) SONIX Quantum 350 2006 8
60 SSM 150 Auto Spreading Resistance Probe (ASRP) SOLID STATE MEASRUEMENT INC. SSM150 1999 0
61 SSM 2000 NANOSRP (Spreading Resistance Measuremnet System) SOLID STATE MEASRUEMENT INC. SSM 2000 Nano SRP 2004 0
62 SSM 495 HG-CV System for EPI resistivity measurement SOLID STATE MEASRUEMENT INC. SSM495 2001 8
63 SSM 5130 HG-CV System for EPI resistivity measurement SOLID STATE MEASRUEMENT INC. SSM5130 2004 12
64 SSM 5200 Automatic CV System for CV/QV/IV measurement SOLID STATE MEASRUEMENT INC. SSM5200 1997 8
65 SSM 530 HG-CV System for EPI resistivity measurement SOLID STATE MEASRUEMENT INC. SSM530 2008 12
66 Tencor / Prometrix RS 35 4PP PROMETRIX RS 35 1998 8
67 TENCOR FLX-2320 KLA TENCOR FLX2320 1993 6
68 Tencor FLX-2908 Thin Film Stress Measurement KLA TENCOR FLX2908 1996 8
69 Tencor HRP100 Step Height Measurement Sytem KLA TENCOR HRP100 1998 8
70 Tencor P-10 Step Height Measurement System KLA TENCOR P-10 1995 8
71 Tencor P-11 Step Height Measurement System KLA TENCOR P-11 1997 8
72 Tencor P-11 Step Height Measurement System KLA TENCOR P-11 1996 8
73 Tencor P-16 Step Height Measurement System KLA TENCOR P-16 8
74 Tencor P-16+ stylus surface profiler KLA TENCOR P16+ 2012 8
75 Tencor P-17 stylus surface profiler KLA TENCOR P-17 2017 8
76 Tencor P-2 Step Height Measurement System KLA TENCOR P-2 8
77 Tencor P-2 Step Height Measurement System KLA TENCOR P-2 8
78 Tencor P-20(H) Step Height Measurement Sytem KLA TENCOR P-20H 8
79 Tencor Viper 2410 Macro Defect Inspection KLA TENCOR VIPER 2410 2001 8
80 Tencor Viper 2410 Macro Defect Inspection KLA TENCOR VIPER 2410 2000 8
81 Union Hisomet-II Measuring Microscope UNION Hisomet-II 0
82 Veeco/DI Dimension 3100 Atomic Force Microscope (AFM) VEECO D3100S-1 8
83 Veeco/DI Dimension 7000 Atomic Force Microscope (AFM) VEECO Dimension 7000 1996 8
84 Zeiss Axiotron HSEB Microscope CARL ZEISS HSEB 8