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장비정보
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장비명
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KLA-Tencor Candela 8620 Optical Defect Inspection |
| 모델명 |
Candela 8620 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
2011-8 |
| 매매상태 |
판매중
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장비상태 |
수리중
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| 제원 |
KLA-Tencor Candela 8620 Optical Surface Analyzer (OSA) is a laser-based inspection system for semiconductor and optoelectronic wafers.
It is fully automated with integrated wafer handling for cassette-to-cassette operation.
The Candela defect detection system simultaneously measures surface reflectivity and topography for automatic defect detection and classification.
The defect detection system's inspection technology combines scatterometry, ellipsometry, reflectometry, and topographical analysis to non-destructively inspect wafer surfaces for defects, and film thickness uniformity, of opaque substrates, epi layers, and transparent film coatings (SiC, GaN, sapphire).
- Cassette Handling
- Laser: Oblique(50mW, 405nm), Normal(85mW, 660nm)
- Spot size: 5㎛ x 4㎛.
- Handler: Mapping,Wafer centering on chuck and FFM: OK, Wafer loading/unloading: OK
- Particle detection: smaller than 0.08㎛ on silicon substrate.
- Scratch: 0.1㎛ wide, 1~2nm deep.
- Pits and Bumps: 20㎛ diameter, 50Å;; deep.
- Stains: 20㎛ diameter, 10Å;; thick.
- can be used for both epi and bare substrate.
- can be used for Si, GaAs, Al2O3,SiC substrate.
- Substrage thickness: 350㎛ ~ 1,300㎛.
- Air Balance system ULPA and HEPA air filter(replaced new one).
- Input Power 230V 6A 50/60Hz
- Input Air: CDA 90 PSI |
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