|
장비정보
|
|
장비명
|
N&K 1700 Trench Depth & Thin film thickness Measurement |
| 모델명 |
N&K 1700 |
제조사 |
N&K |
| 웨이퍼사이즈 |
6"
|
Vintage |
- |
| 매매상태 |
판매중
|
장비상태 |
Operational
|
| 제원 |
*. Film Thickness and Trench profile measurement.
*. Manual load Metrology system.
*. Wafer: 4", 6", 8".
*. Spotsize: 50um.
*. Simultaneously determine thickness, n and k in the spectral range of 190-1000nm, trench profile and provide non-destructive, real time, high throughput measurements directly on the device.
*. Manual & Install software.
*. Pattern recognition software.
*. Installed in Clean-room. |
|
|
|
HOME > 장비 정보 
