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장비정보
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장비명
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Tencor P-20(H) Step Height Measurement Sytem |
| 모델명 |
P-20H |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
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| 매매상태 |
판매중
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장비상태 |
수리중
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| 제원 |
- Long Scan Profiler Measurement.
- Micro Head with L type stylus.
- Measurement Range: 100 ~ 0.3mm Height.
- Scan Length: 210mm.
- Scan Speed : 1㎛ ~ 25 mm/sec.
- Stylus Force: 1 ~100mg.
- Motorized X-Y stage (max sample size:254x254mm).
- 486DX PC & LCD Color Monitor, Windows 3.1.
- Option: Precision Locator,Wafer Handler.
- Utility: Vacuum.
- Power: 110V/50HZ, 4A.
- Anti-bivration table.
- Installed in Clean-room. |
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