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장비정보
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장비명
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Bio-Rad QS-300 FT-IR (EPI, BPSG) |
| 모델명 |
QS-300 |
제조사 |
BIO-RAD |
| 웨이퍼사이즈 |
8"
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Vintage |
1994- |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
■ Capable 4" to 8" Wafer
■ Optical Console
- Michelson Interferometer
- KBr Beam split / - DTGS Detector & Element
- He-Ne Laser & IR Source
■ Wafer Tray / Nose cone
- Wafer Size : up to 8" / - Ruler increments : 5mm
■ FTS Power Supply
■ Upgraded Control PC system with spectromer PCB
- Upgrade Windows PC & LCD color monitor
- OS : Windows XP (Version 5.1)
■ Application software
- QS-300 WIN-EPI (Version 1.25)
- QS-300 WIN-BPSGI (Version 1.24)
- Win-IR Pro (Version 2.5)
*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time. |
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