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장비명 Bio-Rad QS-300 FT-IR (EPI)
모델명 QS-300 제조사 BIO-RAD
웨이퍼사이즈 8" Vintage 1994-7
매매상태 판매중 장비상태 Excellent
제원 ■ Capable 4" to 8" Wafer
■ Optical Console
- Michelson Interferometer
- KBr Beam split / - DTGS Detector & Element
- He-Ne Laser & IR Source
■ Wafer Tray / Nose cone
- Wafer Size : up to 8" / - Ruler increments : 5mm
■ FTS Power Supply
■ Upgraded Control PC system with spectromer PCB
- Upgrade Windows PC & LCD color monitor
- OS : Windows XP (Version 5.1)
■ Application software
- QS-300 WIN-EPI (Version 1.25)
- Win-IR Pro (Version 2.5)

*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.
       
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