|
장비정보
|
|
장비명
|
KLA-Tencor Candela CS20 Optical Defect Inspection |
| 모델명 |
Candela CS20 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
|
Vintage |
2010-6 |
| 매매상태 |
판매중
|
장비상태 |
Excellent
|
| 제원 |
[ General Description ]
Wafer Size : 2 ~8 inch
Illumination Source : 8mW laser, 635 nm wavelength
Operator Interface : Trackball and keyboard standard
Substrate Thickness : 350 μm ~ 1,100 μm
Substrate Material : Any clear or opaque polished surface
[ Performance ]
Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si)
Other Defects and Applications : Particles, scratches, stains, pits, and bumps.
Sensitivity: Minimum detectable size for automatic defect classification:
- Scratches: 100 μm long, 0.1 μm wide, 50 Å;; deep.
- Pits: 20 μm diameter, 50 Å;; deep
- Stains: 20 μm diameter, 10 Å;; thick
[ Application ]
- Opaque substrates
- EPI Layers
- Transparent film coatings (SiC, GaN, Sapphire)
*. Fully refurbished. Installed in Clean-room. Possible demo anytime.
|
|
|
|
HOME > 장비 정보 
