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장비정보
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장비명
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KLA-Tencor Surfscan 6220 (SFS6220)particle counter |
| 모델명 |
SFS 6220 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
1996-9 |
| 매매상태 |
판매중
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장비상태 |
AS-IS
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| 제원 |
*. Configuration:
- Wafer Size : 4 - 8 inch.
- Non-patterned surface Inspection System.
- 0.1 micron Defect Sensitivity (PSL STD).
- 0.02 ppm Haze Sensitivity.
- 0.002 ppm Haze Resolution.
- Accuracy within 1%.
- XY coordinates.
- 488nm Wavelength New Argon Ion laser.
- NIST Calibrated.
- Full Calibration data package.
- Lock Down accessories.
- Tencor approved blower assembly.
- Manuals.
- 208V/60HZ, 17A.
*. To be refurbished.
*. Installed in Clean-room. |
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