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장비정보
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장비명
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N&K 3000 Trench Depth & Thin film thickness Measurement |
| 모델명 |
N&K 3000 |
제조사 |
N&K |
| 웨이퍼사이즈 |
6"
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Vintage |
2005-12 |
| 매매상태 |
판매중
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장비상태 |
AS-IS
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| 제원 |
n&k analyzer 3000 can simultaneously determine thickness and n&k spectra for all type of film/substrate combinations of pattrened and non-pattered wafers
Non-destructive measurements of Trench Depth
Thickness, Refractive Index(n,RI) Extinction Coefficient (k), Energy Bandgap measurements of thin film
and also measure reflectance, transmittance, and interface roughness for a wide variety of thin films and substrates
- Wafer size up to 6" ( available 8" by conversion)
- Fully automatic wafer handling
- Wavelength range DUV-VIS-NIR : 190 to 1000 nm
- 50 um spot size
- Measurement thin films : OXIDE/PR/NITRIDE/OXINITRIDE/POLY/Ti/TiN…
- Measurement items : Trench Depth, thickness, n(RI), K, Reflectance, Transmittance,..
- 2D/3D Map |
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