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장비정보
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장비명
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Tencor / Prometrix RS 55 4PP |
| 모델명 |
RS35 |
제조사 |
PROMETRIX |
| 웨이퍼사이즈 |
8"
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Vintage |
1998-6 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
*. Process: wafer Sheet Resistance measurement
*. Measurement perfomance:
- 4 Point Probe check surface on Silicon wafer
- Measurement range <5 mohm/sq to > 5 Megohm/sq
- Routine check 1-30 sites programmable
- Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites
- XY map up to 1264 sites programmable
*. Measurement Specifications
- Measurement repeatability <0.2% ( 1 Sigma)
- Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range
* S/W Version : ST-6.51 (OmniMap RS55 with StatTrax)
*. Hardware configuration:
- Radial Stage and Probe head Assembly
- Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..)
- Diagnostics Pannel
- DC Power supply
- Operator Console with keyboard
*. Wafer Size: 2"~ 8"
*. Software configuration:
- Operation Software: StatTrax
*. Utility & power
- power requirements 115v 50/60hz
- Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHg
*. Installed in Clean-room.
*. Can demonstrate any time. |
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