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장비정보
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장비명
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Nanometrics Nanospec 6100 |
| 모델명 |
Nanospec 6100 |
제조사 |
NANOMETRICS |
| 웨이퍼사이즈 |
8"
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Vintage |
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| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
•; Linear array head
•; Objevctives (Auto revolver) : 5X,10X,50X
•; Small spot size
•; Fast focus
•; Fast measurements
•; Broad thickness ranges
•; Multipurpose thin and thick film capability
•; Continuous scanning from 210–;800 nanometers
•; Measurement range : 25–;200,000 Å;
•; Optional UV capabilities for measuring very thin films (25Å;–;500Å;)
•; Windows XP
•; S/W : Version 2.0 (Nanospec 6100 for windows)
•; Standard and customized film programs
•; 2D and 3D wafer-mapping software
•; Database storage of measurements
•; Real-time sample and model interferogram plotting
•; Automated focusing
•; Joystick-automated stage
•; Joystick, keyboard, and trackball assembly
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