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장비정보
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장비명
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N&K OptiPrime - CD |
| 모델명 |
OptiPrime - CD |
제조사 |
N&K |
| 웨이퍼사이즈 |
8"
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Vintage |
2015- |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
Key Qualities of OptiPrime - CD
■ Optimized Polarized Reflectance (Rs and Rp) Data
- Wavelength Range: 190 - 1000 nm
- Micro-Spot Technology
■ Can be configured for 200 mm (8”),and 150 mm (6”) Wafers
■ Fully Automated
■ Based on Patented Reflective Optics that Optimizes the Signal-to-Noise Ratio
■ Strong Sensitivity to Sub-Nanometer Structural and Material Variations
- Thickness, n and k (from 190 –; 1000 nm)
■ OCD Metrology for 2-D and 3 -D Structures
(Trenches and Contact Holes)
- Depth, CD, Profile
■ Cognex Pattern Recognition Software
■ No Re-Alignment Issues Upon Light Bulb Replacement
■ Modular design –; Easy to Maintain and Service
■ GEM/SECS Communication Interface
■ SEMI Standard and Third Party Certifications
■ Dimensions (W x D x H): 112 cm x 202 cm x 189 cm
■ Weight (unpacked): 770 Kg
■ Facility Requirements:
100 - 240 V, 50/60 Hz, 1Φ
Vacuum, CDA (for FOUP Load Port)
*** Installed in cleanroom,Excellent working condition.
System performance check data:
1) Total Baseline Fluctuation : 0.55 ( spec < 0.75 )
2) Thickness Repeatability : 0.24Å ( spec < 1.0 Å,1σ) |
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