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장비정보
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장비명
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SDI/SEMILAB FAaST 230 Non-contact CV/IV Measurement System |
| 모델명 |
230-SPV |
제조사 |
SDI/SEMILAB |
| 웨이퍼사이즈 |
8"
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Vintage |
2000-8 |
| 매매상태 |
판매중
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장비상태 |
AS-IS
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| 제원 |
. Up to 8"
. Automatic robotic wafer handling
. Single open-cassette wafer loading station
. Measurement of dielectric and interface properties on monitor wafer
- Dielectric Capacitance (CD) and Thickness (EOT)
- Dielectric Leakage Current (I-V)
- Flatband Voltage (Vfb)
- Interface Trap Density (Dit)
- Interface Trapped Charge (Qit)
- Semiconductor Surface Barrier (Vsb)
- Oxide Total Charge (Qtot)
- Mobile Ionic Charge (Qm), among others
. Suitable for measurement on:
- Semiconductor wafers (e.g. Si, SiGe, InGaAs, SiC, GaN) with high-k and low-k dielectric films (e.g. SiO2, SiNx, Al2O3, HfO2 ;..) |
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