|
장비정보
|
|
장비명
|
KLA Tencor AIT XP+ (Fusion) |
| 모델명 |
AIT AIT XP+(Fusion) |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
|
Vintage |
2000-10 |
| 매매상태 |
판매중
|
장비상태 |
Excellent
|
| 제원 |
[ System Configuration ]
. Wafer size : 200mm
. CE marked
. Single open cssette handler
. Image Computer
. OS : Microsoft Windows NT 4.0
. Application S/W : Version 6.3.24.3 ( Build Time 2006.8 )
. Laser: 75mW 488nm argon ion laser
. (3) Collection Channels
. Spot Size 7um, 5um, 3.5um
. Internal Microscope Review
- Microscope review Objectives 10x, 50x, 100x, 150x
- Bright / Dark Field View
- AutoFocus Capability
. Brooks Robot and pre aligner
. Blower Unit
. KLARF Output File
Facility Requirements:
- CDA : 1/4" , min 90psi
- Vacuum : 1/4" 20-in Hg
- Power
. (Main): 208VAC, 3-Phase, 4-Wire, Freq 50/60Hz
. (Image computer): 208VAC, 3-Phase, -4 Wire, Freq 50/60Hz
*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time. |
|
|
|
HOME > 장비 정보 
