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장비정보
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장비명
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Semilab WT-2000PVN( μ-PCD) Carrier life time measurement |
| 모델명 |
WT-2000PV |
제조사 |
SDI/SEMILAB |
| 웨이퍼사이즈 |
8"
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Vintage |
2009-5 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
■ System Configuration
. WT2000PV main unit with scanning capability
. Sample stage (Max wafer size 200mm)
. Dual PC : DOS PC & Window PC
. μ-PCD head for lifetime measurements
. Application S/W : Wintau 32 ( Windows PC )
. Vacuum pump
. Utility :
- Power : 220V or 115V, 50/60Hz
- Vacuum : 1/4" 0.2 ~0.5 bar
■ Hadware Function Capability
. μ-PCD measurement (904 nm Laser)
. Laser Power Feedback
. Automatic Head Height
. Capacitive Sensor
. Head Temperature Sensor
. Others
■ Application
. Monitoring defects and contamination ( bulk and surface region of Si wafer)
■ Measurement
. Carrier Lifetime Measurement (μ-PCD), Laser wavelength : 904nm
. High resolution mapping and discrete point measurements
*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time. |
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