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장비정보
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장비명
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Tencor P-17 stylus surface profiler |
| 모델명 |
P-17 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
2017-6 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
[Features]
- Wafer size : up to 8 inch
- Microhead 5-xr (13, 131, 1048 um range)
- Stylus tip (green): 2um radius
- Objective lens : 6.4x, Magnification range : 173x~750x
- Step height: Nanometers to 1000µ;m
- Step height repeatability : 4 Å; ( 1σ, 1µ;m )
- Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg )
- Scan full diameter of the sample without stitching for bow and film stress measurement
- Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage
- Dual view optics ( side and top )
- Fully automated with sequencing, pattern recognition
- OS : Windows 7, S/W : Profiler v8.0, Apex Advanced Analysis(Option)
[Applications]
- Step Height mesurement (2D/3D)
- Roughness and Waviness
- Bow and Shape
- Thin film Stress
- Defect review ( Defect surface topography)
*. To be refurbished.
*. Installed in Clean-room. |
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