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장비명 SSM 2000 NANOSRP
모델명 SSM 2000 Nano SRP 제조사 SOLID STATE MEASRUEMENT INC.
웨이퍼사이즈 Other Vintage 2004-
매매상태 판매중 장비상태 Excellent
제원 System Measurement Performance
- Spreading Resistance Dynamic Range : 1Ω to > 10Ω
- Reistivity : 10-⁴~ 4x10⁴Ωcm
- Concentration : E11 cm-3 ~ E21 cm-3

Computer Subsystem
- Operating System : Window XP
- Image Capture : Matrox Pulsar Frame Grabber / Video Controller
- Application S/W : NanoSRP'" software

Automated Features
•; Probe conditioning /•; Probe calibration /•; Sample alignment /•; Unattended operation
( (NanoSRP™ Bevel Edge Alignment Tool )

Probing Subsystem with multiple sample fixture
- Probe Spacing : Minimum 65 µ;m (Standard)
- Probe Load : 10g (standard)
- Sample Mounts : Up to 6 samples
- Vision System : DIC / 5x, 10x, 20x, 50x objectives / Cohu 2100 series CCIR/RAL gray scale camera
- Stage Motion : 80 mm X/Y/Z-axis range (80mm/90mm/3mm)
- Vibration Damping Table

Accessories
- Mounted probes / Bevel Sample Mounts /Grinding jig / Heat sink for sample mounting /Mounting wax /0.05 or 0.1 um Diamond compound
- Measurement fixture: 6 position
- Conventional probe conditioning fixture :
QTA/P probe qualification samples / Probe Shaper Tool / Probe Cleaner Tool / Gorey-Schneider probe grinder


*. Fully refurbished.
*. Can demonstrate any time.
     
  - 충청남도 천안시 동남구 통정3로 3 (주)제네시스 우)31208 TEL: 041-554-6920~1 FAX: 041-554-6922