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장비정보
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장비명
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SSM 2000 NANOSRP |
| 모델명 |
SSM 2000 Nano SRP |
제조사 |
SOLID STATE MEASRUEMENT INC. |
| 웨이퍼사이즈 |
Other
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Vintage |
2004- |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
System Measurement Performance
- Spreading Resistance Dynamic Range : 1Ω to > 10Ω
- Reistivity : 10-⁴~ 4x10⁴Ωcm
- Concentration : E11 cm-3 ~ E21 cm-3
Computer Subsystem
- Operating System : Window XP
- Image Capture : Matrox Pulsar Frame Grabber / Video Controller
- Application S/W : NanoSRP'" software
Automated Features
- Probe conditioning / - Probe calibration / - Sample alignment / - Unattended operation
Probing Subsystem with multiple sample fixture
- Probe Spacing : Minimum 65 um (Standard)
- Probe Load : 10g (standard)
- Sample Mounts : Up to 6 samples
- Vision System : DIC / 5x, 10x, 20x, 50x objectives / Cohu 2100 series CCIR/RAL gray scale camera
- Stage Motion : 80 mm X/Y/Z-axis range (80mm/90mm/3mm)
- Vibration Damping Table
Accessories
- Mounted probes / Bevel Sample Mounts /Grinding jig / Heat sink for sample mounting
/Mounting wax /0.05 or 0.1 um Diamond compound
- Measurement fixture: 6 position
- Conventional probe conditioning fixture :
(QTA/P probe qualification samples / Probe Shaper Tool / Probe Cleaner Tool / Gorey-Schneider probe grinder)
*. Fully refurbished.
*. Can demonstrate any time. |
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