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장비정보
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장비명
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KLA-Tencor Candela 8600 Optical Defect Inspection |
| 모델명 |
Candela 8600 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
6"
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Vintage |
2011-01 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
KLA-Tencor Candela 8600 Optical Surface Analyzer (OSA) is a laser-based inspection system for semiconductor and optoelectronic wafers.
It is manual wafer handling tool.
The Candela defect detection system simultaneously measures surface reflectivity and topography for automatic defect detection and classification.
The defect detection system's inspection technology combines scatterometry, ellipsometry, reflectometry, and topographical analysis to non-destructively inspect wafer surfaces for defects, and film thickness uniformity, of opaque substrates, epi layers, and transparent film coatings (SiC, GaN, sapphire).
- Laser: Oblique(50mW, 405nm), Normal(85mW, 660nm)
- Spot size: 5㎛ x 4㎛.
- Particle detection: smaller than 0.08㎛ on silicon substrate.
- Scratch: 0.1㎛ wide, 1~2nm deep.
- Pits and Bumps: 20㎛ diameter, 50Å;; deep.
- Stains: 20㎛ diameter, 10Å;; thick.
- can be used for both epi and bare substrate.
- can be used for Si, GaAs, Al2O3,SiC substrate.
- Substrage thickness: 350㎛ ~ 1,300㎛.
- Air Balance system ULPA and HEPA air filter(replaced new one).
- Input Power 230V 5A 50/60Hz
- Input Air: CDA 90 PSI
*. Fully refurbished. Installed in Clean-room.Can demonstrate anytime. |
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