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장비정보
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장비명
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SSM 5130 HG-CV System for EPI resistivity measurement |
| 모델명 |
SSM5130 |
제조사 |
SOLID STATE MEASRUEMENT INC. |
| 웨이퍼사이즈 |
12"
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Vintage |
2004-1 |
| 매매상태 |
판매중
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장비상태 |
수리중
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| 제원 |
■ Capable up to 12" Wafer
■ SSM 52 Capacitance Measurement Unit
■ Auto wafer handling (Genmark robot & pre aligner)
■ Motor control unit
■ Pneumatic control Unit
■ PC System
■ PROCAP software
■ Performance
- CV Meter Noise Test (Schottky Diode Test): 1 STD(%) <0.167%
- MOS Wafer Area Test : 1 STD(%) <0.1%
■ Capacitance: 0.5~ 2000pF
■ Conductance: 0.5 ~ 2000μS
■ DC Bias voltage: ± 250V
■ Ramp Rate: 0 ~ 50 V/s continuously variable
■ Drive Signal Frequency at 1Mhz voltage=15mV rms
■Stress Voltage: ± 250V
■ CDA: 80~100psi, Nitrogen for sample purge:0~15psi
■ Ambient temperature: 18° - 25°C ± 2°C over 24 hour period |
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