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장비정보
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장비명
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KLA-Tencor OSA 6100 Optical Defect Inspection |
| 모델명 |
OSA6100 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
6"
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Vintage |
2005-9 |
| 매매상태 |
판매중
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장비상태 |
수리중
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| 제원 |
[ General Description ]
Wafer Size : 2 ~ 6 inch
Illumination Source : 25 mW laser, 405 nm wavelength
Operator Interface : Trackball and keyboard standard
Substrate Thickness : 350 μm ~ 1,100 μm
Substrate Material : Any clear or opaque polished surface
[ Performance ]
Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si)
Other Defects and Applications : Particles, scratches, stains, pits, and bumps.
Sensitivity: Minimum detectable size for automatic defect classification:
- Scratches: 100 μm long, 0.1 μm wide, 50 Å;; deep.
- Pits: 20 μm diameter, 50 Å;; deep
- Stains: 20 μm diameter, 10 Å;; thick
[ Application ]
- Disk substrates |
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