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장비정보
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장비명
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KLA-Tencor Candela CS20 Optical Defect Inspection |
| 모델명 |
CS20 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
6"
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Vintage |
2006-2 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
[ General Description ]
Wafer Size : 2 ~8 inch
Illumination Source : 8mW laser, 635 nm wavelength
Operator Interface : Trackball and keyboard standard
Substrate Thickness : 350 μm ~ 1,100 μm
Substrate Material : Any clear or opaque polished surface
[ Performance ]
Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si)
Other Defects and Applications : Particles, scratches, stains, pits, and bumps.
Sensitivity: Minimum detectable size for automatic defect classification:
- Scratches: 100 μm long, 0.1 μm wide, 50 Å; deep.
- Pits: 20 μm diameter, 50 Å; deep
- Stains: 20 μm diameter, 10 Å; thick
[ Application ]
- Opaque substrates
- EPI Layers
- Transparent film coatings (SiC, GaN, Sapphire)
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