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장비정보
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장비명
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Nanometrics Nanospec 2100 Thin Film Thickness measurement |
| 모델명 |
2100 |
제조사 |
NANOMETRICS |
| 웨이퍼사이즈 |
8"
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Vintage |
1996-11 |
| 매매상태 |
판매중
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장비상태 |
수리중
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| 제원 |
*. Process: Film thickness measurement.
- silicon dioxide on silicon 400~ 30,000 A.
- photo resist on silicon 500~ 40,000 A.
- other thin films.
*. Hardware configuration:
- Optical microscope & objectives 5x,10x,40x.
- Spectrophotometer Head.
- Microcomputer & Monitor.
- Photo intensity Display & Wavelength counter.
- Microscope Stage.
*. Wavelength : 390~800 nm TungstenLamp 12V /50W.
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