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장비정보
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장비명
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Tencor P-15 Step Height Measurement System |
| 모델명 |
P-15 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
2002-8 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
- Long Scan Profiler P-15 Measurement.
- Micro Head II SR
- Stylus Tip (Green): 2um radius
- Measurement Range: 13㎛,65㎛,327㎛.
- Scan Length: 205mm.
- Scan Speed : 1㎛ ~ 25 mm/sec.
- Stylus Force: 1 ~50mg.
- Motorized X-Y stage (max sample size:254x254mm).
- Pentium III 733MHz, Ram 256MB & 19" LCD Color Monitor, Windows NT 4.0
- S/W Version : 6.41
- Utility: Vacuum.
- Power: 220V/50HZ, 4A.
- Installed in Clean-room.
- Can demonstrate any time. |
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