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장비정보
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장비명
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TENCOR FLX-2320 |
| 모델명 |
FLX2320 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
6"
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Vintage |
1993-6 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
*.Measurement
-Wafer: 6"
-Speed: 5 sec. for 150mm wafer.
-Range: 2x10E7 ~ 4x10E7 dyne/cm2
-RMS Noise: 0.0001 mE-1(radius=10,000 meters)
-Resolution:0.00003mE-1(33 kilometers)
-Min scan setp: 0.02mm
-Max Points Per Scan: 1250
-Min Radius: 2.0m(for 80mm scan length)
-Temperature Range: room temperature ~ 500 C
*.Light Source: 670nm(3mW), 750nm(3mW) Laser.
*.Dimension: 46cm(18")x46cm(18")x56cm(22") plus computer.
*.Weight: 45.5Kg
*.Utility
-Operation temperature: 18~22 C(64~72F)
-Gas Connection: Cooling gas(Nitrogen, Class 100 Air)
-Power: 115V, 11A, 50/60Hz
-Computer: Pentium 200Mhz,32MB RAM, 3GB HDD, 17" LCD Monitor.
*.Intalled in a clean room and can demonstrate any time. |
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