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장비정보
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장비명
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KLA-Tencor Surfscan 6200 particle counter |
| 모델명 |
SFS 6200 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
1994-7 |
| 매매상태 |
판매중
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장비상태 |
Operational
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| 제원 |
*.Configuration:
- Wafer Size : 4 - 8 inch.
- Non-patterned surface Inspection System.
- 0.1 micron Defect Sensitivity (PSL STD).
- 0.02 ppm Haze Sensitivity.
- 0.002 ppm Haze Resolution.
- Accuracy within 1%.
- XY coordinates.
- Lock Down accessories.
- Tencor approved blower assembly.
- 30mW New Ar-Laser
- 208V/60HZ, 17A.
- MS-DOS 6.22 ,Windows 3.1.
- Software version: 2.1.
*. Installed in Clean-room.. |
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