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장비정보
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장비명
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Nanometrics Nanospec 9300 Thin Film Thickness Measurement |
| 모델명 |
Nanospec 9300 |
제조사 |
NANOMETRICS |
| 웨이퍼사이즈 |
12"
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Vintage |
2002-6 |
| 매매상태 |
판매중
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장비상태 |
Operational
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| 제원 |
Currently 12" configured (It can be modified for 8" open cassette handling)
Spectroscopic Reflectometer (SR)
Two optical light sources
Visable tungsten halogen lamp
UV deuterium arc lamp
Lens 4x,15x (Visible & UV)
System Computer & LCD Monitor
Windows XP-based N2000 metrology software(Version N2000 4.2.90 Beta)
Head Type : UV DIO
Video camera : RS170(B/W)
Wafer Handling
Kensington Robot & Stage
Asyst FOUP 300mm
Input power
208VAC 18A 50/60Hz
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