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장비정보
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장비명
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SDI/SEMILAB FAaST 200-SL Non-contact CV/IV Measurement System |
| 모델명 |
FAaST 200 SL |
제조사 |
SDI/SEMILAB |
| 웨이퍼사이즈 |
8"
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Vintage |
- |
| 매매상태 |
판매중
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장비상태 |
AS-IS
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| 제원 |
non-contact electrical C-V & I-V measurement system capable of measuring on product wafers.
Measurements can be made in scribe line test sites or in the active cell area.
Cell measurements allow for the first time in-line electrical monitoring of topology related processing issues.
Major applications include measurements of SiO2, Nitrided Oxides, advanced high-K and low-K dielectrics |
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