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장비정보
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장비명
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Hitachi SEM S-4160 |
| 모델명 |
S-4160 |
제조사 |
HITACHI |
| 웨이퍼사이즈 |
8"
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Vintage |
2000-1 |
| 매매상태 |
판매중
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장비상태 |
Operational
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| 제원 |
Performance:
Rresolution: 2.5 nm at 30kv
Magnification: 20X - 300KX
Electron Optics:
Electron gun: Cold field emmission source, 0.5 - 30 kV
Lens type: electromagnetic
Objective aperture: 4 position externally selectable
Stigmator: Octopole electromagnetic
Scanning coil: 2-stage electromagnetic
Sample Chamber
Size: 8" wafer exchangeable
Pump: Turbo pumped
Stage motion: 5 axis motor driven
X/Y: 150 mm, Z: 5-30 mm, T: 0 Deg - +45 Deg., R: 360 deg continuous
Display system:
Image display: Dual 12" monitors
* Option : Changeable into image capture system with LCD Color monitor
Vacuum system:
Full automatic operation with pneumatic valve control
Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber
Ion pump: 60 L/s X1, 20 L/s X2
Speciment chamber: DP (570 L/s)
Foreline: Rotary pump |
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