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장비정보
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장비명
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N&K 3700 RT Metrology System |
| 모델명 |
N&K 3700 RT |
제조사 |
N&K |
| 웨이퍼사이즈 |
8"
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Vintage |
2004-7 |
| 매매상태 |
판매중
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장비상태 |
AS-IS
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| 제원 |
Broadband spectrometry for film thickness on transparent substrates, including photomask reticles.
Spotsize: R = 50um, T < 400um
The n&k 3700-RT automated system is designed for handling 5” or 6” square masks or up to 8” square samples.
These systems can also be configured for transparent wafers.
The n&k 3700-RT simultaneously determines thickness, and n and k in the spectral range of 190-1000nm and provide non-destructive, real time, high throughput measurements directly on the device. This system collects reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point and encompasses advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. |
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