Metrology
 
 HOME >Tool's Information
Tool's Specification.
Tool Name N&K 1700 Trench Depth & Thin film thickness Measurement
Model N&K 1700 Maker N&K
Wafer Size 6" Vintage -
Sell Status SELL Tool's Condition Operational
Description *. Film Thickness and Trench profile measurement.
*. Manual load Metrology system.
*. Wafer: 4", 6", 8".
*. Spotsize: 50um.
*. Simultaneously determine thickness, n and k in the spectral range of 190-1000nm, trench profile and provide non-destructive, real time, high throughput measurements directly on the device.
*. Manual & Install software.
*. Pattern recognition software.
*. Installed in Clean-room.
 
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922