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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Hitachi SEM S-5000 |
| Model |
S-5000 |
Maker |
HITACHI |
| Wafer Size |
Other
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Vintage |
1996- |
| Sell Status |
SELL
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Tool's Condition |
AS-IS
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| Description |
*. Image Resolution:
- 30KV 0.6nm
- 1 KV 2.5nm with a test specimen
*.Magnification 20X ~ 300,000X
*. Stage Movement X กพ3.5 mm,Y กพ2 mm,Z กพ0.3 mm,Tilt กพ15 tilt
*. Sample holder Column insert type
*. Sample exchange Goniometer type
*. Stage drive Drive X/Y/TILT are motor driven,Control Manual control by trackball
*. Electron gun Cold field emission source
- Accel voltage: 0.5 ~ 30 KV
- Lens system 3-stage electromagnetic lens
- Objective aperture 4-opennings, selectable & alignable from outside the vacuum
*. CRT 12 inch viewing CRT X 2
*. Image processing auto image Brightness control
*. Scan speed Viewing TV, 0, 3, 2, 10, 20 s/frame,Recording 40, 80, 160, 320 s/frame
*. Vacuum pump IP1 60,IP2 20,IP3 20,TMP 340,Rotary pump 145
*. Dimension 108(w) x 132(d) X 175(h) cm, 1,380kg
*. Utility :
- Room temp 15กษ ~ 25 กษ,
- Room humidity below 60%
- Power AC 100, 115V กพ10% 50/60Hz, 4KVA
*. Installed in Clean-room |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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