Metrology
 
 HOME >Tool's Information
Tool's Specification.
Tool Name Bio-Rad QS-300 FT-IR (EPI, BPSG)
Model QS-300 Maker BIO-RAD
Wafer Size 8" Vintage 1994-
Sell Status SELL Tool's Condition Excellent
Description กแ Capable 4" to 8" Wafer
กแ Optical Console
- Michelson Interferometer
- KBr Beam split / - DTGS Detector & Element
- He-Ne Laser & IR Source
กแ Wafer Tray / Nose cone
- Wafer Size : up to 8" / - Ruler increments : 5mm
กแ FTS Power Supply
กแ Upgraded Control PC system with spectromer PCB
- Upgrade Windows PC & LCD color monitor
- OS : Windows XP (Version 5.1)
กแ Application software
- QS-300 WIN-EPI (Version 1.25)
- QS-300 WIN-BPSGI (Version 1.24)
- Win-IR Pro (Version 2.5)

*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.
       
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922