|
|
|
|
|
 HOME >Tool's Information |
|
Tool's Specification.
|
|
Tool Name
|
N&K 3000 Trench Depth & Thin film thickness Measurement |
| Model |
N&K 3000 |
Maker |
N&K |
| Wafer Size |
8"
|
Vintage |
- |
| Sell Status |
SELL
|
Tool's Condition |
AS-IS
|
| Description |
n&k analyzer 3000 can simultaneously determine thickness and n&k spectra for all type of film/substrate combinations of pattrened and non-pattered wafers
Non-destructive measurements of Trench Depth
Thickness, Refractive Index(n,RI) Extinction Coefficient (k), Energy Bandgap measurements of thin film
and also measure reflectance, transmittance, and interface roughness for a wide variety of thin films and substrates
- Wafer size up to 6" ( available 8" by conversion)
- Fully automatic wafer handling
- Wavelength range DUV-VIS-NIR : 190 to 1000 nm
- 50 um spot size
- Measurement thin films : OXIDE/PR/NITRIDE/OXINITRIDE/POLY/Ti/TiN…
- Measurement items : Trench Depth, thickness, n(RI), K, Reflectance, Transmittance,..
- 2D/3D Map |
|
|
|
|
|
- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
|
|
|
