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Tool's Specification.
Tool Name SSM 495 HG-CV System for EPI resistivity measurement
Model SSM 495 Maker SOLID STATE MEASRUEMENT INC.
Wafer Size 8" Vintage 2009-2
Sell Status SELL Tool's Condition Excellent
Description ¡á Capable up to 8" Wafer
¡á SSM 42D Capacitance Measurement Unit
¡á Motor control unit
¡á Pneumatic control Unit
¡á Windows XP PC System
¡á PROCAP software
¡á Performance
- CV Meter Noise Test (Schottky Diode Test): 1 STD(%) <0.167%
- MOS Wafer Area Test : 1 STD(%) <0.1%

¡á Capacitance: 0.5~ 2000pF
¡á Conductance: 0.5 ~ 2000¥ìS
¡á DC Bias voltage: ¡¾ 250V
¡á Ramp Rate: 0 ~ 50 V/s continuously variable
¡á Drive Signal Frequency at 1Mhz voltage=15mV rms
¡á Stress Voltage: ¡¾ 250V
¡á CDA: 80~100psi, Nitrogen for sample purge:0~15psi
¡á Ambient temperature: 18¡Æ - 25¡ÆC ¡¾ 2¡ÆC over 24 hour period



*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922