Metrology
 
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Tool's Specification.
Tool Name SSM 2000
Model SSM2000 Maker SOLID STATE MEASRUEMENT INC.
Wafer Size Other Vintage -
Sell Status SELL Tool's Condition Refurbishing
Description System Measurement Performance
- Spreading Resistance Dynamic Range : 1§Ù to > 10§Ù
- Reistivity : 10-©ù~ 4x10©ù¥Øcm
- Concentration : E11 cm-3 ~ E21 cm-3

Computer Subsystem
- Operating System : Window XP
- Image Capture : Matrox Pulsar Frame Grabber / Video Controller
- Application S/W : NanoSRP'" software

Automated Features
•;; Probe conditioning /•;; Probe calibration /•;; Sample alignment /•;; Unattended operation
( (NanoSRP¢â Bevel Edge Alignment Tool )

Probing Subsystem with multiple sample fixture
- Probe Spacing : Minimum 65 µ;;m (Standard)
- Probe Load : 10g (standard)
- Sample Mounts : Up to 6 samples
- Vision System : DIC / 5x, 10x, 20x, 50x objectives / Cohu 2100 series CCIR/RAL gray scale camera
- Stage Motion : 80 mm X/Y/Z-axis range (80mm/90mm/3mm)
- Vibration Damping Table

Accessories
- Mounted probes / Bevel Sample Mounts /Grinding jig / Heat sink for sample mounting /Mounting wax /0.05 or 0.1 um Diamond compound
- Measurement fixture: 6 position
- Conventional probe conditioning fixture :
QTA/P probe qualification samples / Probe Shaper Tool / Probe Cleaner Tool / Gorey-Schneider probe grinder


*. To be refurbished.
       
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922