Metrology
 
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Tool's Specification.
Tool Name Nanometrics Nanospec 6100
Model Nanospec 6100 Maker NANOMETRICS
Wafer Size 8" Vintage -
Sell Status SELL Tool's Condition Excellent
Description •; Linear array head
•; Objevctives (Auto revolver) : 5X,10X,50X
•; Small spot size
•; Fast focus
•; Fast measurements
•; Broad thickness ranges
•; Multipurpose thin and thick film capability
•; Continuous scanning from 210–;800 nanometers
•; Measurement range : 25–;200,000 Å;
•; Optional UV capabilities for measuring very thin films (25Å;–;500Å;)
•; Windows XP
•; S/W : Version 2.0 (Nanospec 6100 for windows)
•; Standard and customized film programs
•; 2D and 3D wafer-mapping software
•; Database storage of measurements
•; Real-time sample and model interferogram plotting
•; Automated focusing
•; Joystick-automated stage
•; Joystick, keyboard, and trackball assembly
       
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922