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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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N&K OptiPrime - CD |
| Model |
OptiPrime - CD |
Maker |
N&K |
| Wafer Size |
8"
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Vintage |
- |
| Sell Status |
SELL
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Tool's Condition |
AS-IS
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| Description |
Key Qualities of OptiPrime - CD
¡á Optimized Polarized Reflectance (Rs and Rp) Data
- Wavelength Range: 190 - 1000 nm
- Micro-Spot Technology
¡á Can be Configured for 300 mm (12¡±), 200 mm (8¡±),and 150 mm (6¡±) Wafers
¡á Fully Automated
¡á Based on Patented Reflective Optics that Optimizes the Signal-to-Noise Ratio
¡á Strong Sensitivity to Sub-Nanometer Structural and Material Variations
- Thickness, n and k (from 190 –; 1000 nm)
¡á OCD Metrology for 2-D and 3 -D Structures
(Trenches and Contact Holes)
- Depth, CD, Profile
¡á Cognex Pattern Recognition Software
¡á No Re-Alignment Issues Upon Light Bulb Replacement
¡á Modular design –; Easy to Maintain and Service
¡á GEM/SECS Communication Interface
¡á SEMI Standard and Third Party Certifications
¡á Dimensions (W x D x H): 112 cm x 202 cm x 189 Ã÷
¡á Weight (unpacked): 770 Kg
¡á Facility Requirements:
100 - 240 V, 50/60 Hz, 1¥Õ
Vacuum, CDA (for FOUP Load Port)
*** To be refurbished, Installed in cleanroom.
*** This system may have some difference in configuration after refurbishment and system full checking.
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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