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Tool's Specification.
Tool Name Veeco/DI Dimension 3100 Atomic Force Microscope (AFM)
Model D3100S-1 Maker VEECO
Wafer Size 8" Vintage -
Sell Status SELL Tool's Condition Excellent
Description Key Features :
. Scans samples up to 8 inch
. Little or no sample preparation for increased productivity
. Rigid ,low vibration construction for superior image quality
. Integrated top-view color video optics with 1.5 um resolution and zoom
. Easily changes among all AFM/STM scanning modes/techniques without tools
. Automated stepping for scanning multiple areas unattended
. Trakscan laser tracking system improves image and measurement quality
. Laser spot alignment window for easy setup
. Superior resolution and linearity in all three dimensions

- Dimension SPM Head
- X-Y imaging area approx. 90um square
- Z range approx. 6 um
- Lateral accuracy typically within 1%, maximum 2%
- Standard 150mm vacuum chuck for 100mm,125mm,150mm wafers
- Optional 200mm vacuum chuck for 150mm and 200mm wafers
- Inspectable Area 125x100mm ;
allows coverage of one-half of 150mm wafer without manual sample rotation
Full wafer with manual rotation
- Nanoscope Dimension 3100 Controller
- Nanoscope IIIa Scanning Probe Microscope Controller
- System Computer
- TMC Micro-G Isolation Table


*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922