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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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KLA-Tencor Candela 8600 Optical Defect Inspection |
| Model |
Candela 8600 |
Maker |
KLA TENCOR |
| Wafer Size |
6"
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Vintage |
2011-01 |
| Sell Status |
SELL
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Tool's Condition |
Excellent
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| Description |
KLA-Tencor Candela 8600 Optical Surface Analyzer (OSA) is a laser-based inspection system for semiconductor and optoelectronic wafers.
It is manual wafer handling tool.
The Candela defect detection system simultaneously measures surface reflectivity and topography for automatic defect detection and classification.
The defect detection system's inspection technology combines scatterometry, ellipsometry, reflectometry, and topographical analysis to non-destructively inspect wafer surfaces for defects, and film thickness uniformity, of opaque substrates, epi layers, and transparent film coatings (SiC, GaN, sapphire).
- Laser: Oblique(50mW, 405nm), Normal(85mW, 660nm)
- Spot size: 5зн x 4зн.
- Particle detection: smaller than 0.08зн on silicon substrate.
- Scratch: 0.1зн wide, 1~2nm deep.
- Pits and Bumps: 20зн diameter, 50Å;; deep.
- Stains: 20зн diameter, 10Å;; thick.
- can be used for both epi and bare substrate.
- can be used for Si, GaAs, Al2O3,SiC substrate.
- Substrage thickness: 350зн ~ 1,300зн.
- Air Balance system ULPA and HEPA air filter(replaced new one).
- Input Power 230V 5A 50/60Hz
- Input Air: CDA 90 PSI
*. Fully refurbished. Installed in Clean-room.Can demonstrate anytime. |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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