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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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SSM 5130 HG-CV System for EPI resistivity measurement |
| Model |
SSM5130 |
Maker |
SOLID STATE MEASRUEMENT INC. |
| Wafer Size |
12"
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Vintage |
2004-1 |
| Sell Status |
SELL
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Tool's Condition |
Refurbishing
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| Description |
¡á Capable up to 12" Wafer
¡á SSM 52 Capacitance Measurement Unit
¡á Auto wafer handling (Genmark robot & pre aligner)
¡á Motor control unit
¡á Pneumatic control Unit
¡á PC System
¡á PROCAP software
¡á Performance
- CV Meter Noise Test (Schottky Diode Test): 1 STD(%) <0.167%
- MOS Wafer Area Test : 1 STD(%) <0.1%
¡á Capacitance: 0.5~ 2000pF
¡á Conductance: 0.5 ~ 2000¥ìS
¡á DC Bias voltage: ¡¾ 250V
¡á Ramp Rate: 0 ~ 50 V/s continuously variable
¡á Drive Signal Frequency at 1Mhz voltage=15mV rms
¡áStress Voltage: ¡¾ 250V
¡á CDA: 80~100psi, Nitrogen for sample purge:0~15psi
¡á Ambient temperature: 18¡Æ - 25¡ÆC ¡¾ 2¡ÆC over 24 hour period |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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