|
|
|
|
|
 HOME >Tool's Information |
|
Tool's Specification.
|
|
Tool Name
|
SSM 530 HG-CV System for EPI resistivity measurement |
| Model |
SSM530 |
Maker |
SOLID STATE MEASRUEMENT INC. |
| Wafer Size |
12"
|
Vintage |
2008-6 |
| Sell Status |
SELL
|
Tool's Condition |
Refurbished
|
| Description |
¡á Capable up to 12" Wafer
¡á SSM 52 Capacitance Measurement Unit
¡á Motor control unit
¡á Pneumatic control Unit
¡á PC System
¡á PROCAP software
¡á Performance
- CV Meter Noise Test (Schottky Diode Test): 1 STD(%) <0.167%
- MOS Wafer Area Test : 1 STD(%) <0.1%
¡á Capacitance: 0.5~ 2000pF
¡á Conductance: 0.5 ~ 2000¥ìS
¡á DC Bias voltage: ¡¾ 250V
¡á Ramp Rate: 0 ~ 50 V/s continuously variable
¡á Drive Signal Frequency at 1Mhz voltage=15mV rms
¡áStress Voltage: ¡¾ 250V
¡á CDA: 80~100psi, Nitrogen for sample purge:0~15psi
¡á Ambient temperature: 18¡Æ - 25¡ÆC ¡¾ 2¡ÆC over 24 hour period |
|
|
|
|
|
- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
|
|
|
