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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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SSM 495 HG-CV System for EPI resistivity measurement |
| Model |
SSM495 |
Maker |
SOLID STATE MEASRUEMENT INC. |
| Wafer Size |
8"
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Vintage |
2001-1 |
| Sell Status |
SELL
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Tool's Condition |
Excellent
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| Description |
■ Capable up to 8" Wafer
■ SSM 42 Capacitance Measurement Unit
■ Motor control unit
■ Pneumatic control Unit
■ PC System
■ PROCAP software
■ Performance
- CV Meter Noise Test (Schottky Diode Test): 1 STD(%) <0.167%
- MOS Wafer Area Test : 1 STD(%) <0.1%
■ Capacitance: 0.5~ 2000pF
■ Conductance: 0.5 ~ 2000μS
■ DC Bias voltage: ± 250V
■ Ramp Rate: 0 ~ 50 V/s continuously variable
■ Drive Signal Frequency at 1Mhz voltage=15mV rms
■Stress Voltage: ± 250V
■ CDA: 80~100psi, Nitrogen for sample purge:0~15psi
■ Ambient temperature: 18° - 25°C ± 2°C over 24 hour period |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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Metrology