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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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KLA-Tencor OSA 6100 Optical Defect Inspection |
| Model |
OSA6100 |
Maker |
KLA TENCOR |
| Wafer Size |
6"
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Vintage |
2006-9 |
| Sell Status |
SELL
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Tool's Condition |
Refurbishing
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| Description |
[ General Description ]
Wafer Size : 2 ~ 6 inch
Illumination Source : 25 mW laser, 405 nm wavelength
Operator Interface : Trackball and keyboard standard
Substrate Thickness : 350 レm ~ 1,100 レm
Substrate Material : Any clear or opaque polished surface
[ Performance ]
Defect Sensitivity 0.08 レm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si)
Other Defects and Applications : Particles, scratches, stains, pits, and bumps.
Sensitivity: Minimum detectable size for automatic defect classification:
- Scratches: 100 レm long, 0.1 レm wide, 50 Å;;; deep.
- Pits: 20 レm diameter, 50 Å;;; deep
- Stains: 20 レm diameter, 10 Å;;; thick
[ Application ]
- Disk substrates |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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