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Tool's Specification.
Tool Name KLA-Tencor Candela CS20 Optical Defect Inspection
Model CS20 Maker KLA TENCOR
Wafer Size 6" Vintage 2006-2
Sell Status SELL Tool's Condition Refurbishing
Description [ General Description ]
Wafer Size : 2 ~8 inch
Illumination Source : 8mW laser, 635 nm wavelength
Operator Interface : Trackball and keyboard standard
Substrate Thickness : 350 レm ~ 1,100 レm
Substrate Material : Any clear or opaque polished surface


[ Performance ]
Defect Sensitivity 0.08 レm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si)
Other Defects and Applications : Particles, scratches, stains, pits, and bumps.
Sensitivity: Minimum detectable size for automatic defect classification:
- Scratches: 100 レm long, 0.1 レm wide, 50 Å; deep.
- Pits: 20 レm diameter, 50 Å; deep
- Stains: 20 レm diameter, 10 Å; thick

[ Application ]
- Opaque substrates
- EPI Layers
- Transparent film coatings (SiC, GaN, Sapphire)
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922