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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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KLA-Tencor Candela 8620 Optical Defect Inspection |
| Model |
Candela 8620 |
Maker |
KLA TENCOR |
| Wafer Size |
8"
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Vintage |
2011-8 |
| Sell Status |
SELL
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Tool's Condition |
Refurbishing
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| Description |
KLA-Tencor Candela 8620 Optical Surface Analyzer (OSA) is a laser-based inspection system for semiconductor and optoelectronic wafers.
It is fully automated with integrated wafer handling for cassette-to-cassette operation.
The Candela defect detection system simultaneously measures surface reflectivity and topography for automatic defect detection and classification.
The defect detection system's inspection technology combines scatterometry, ellipsometry, reflectometry, and topographical analysis to non-destructively inspect wafer surfaces for defects, and film thickness uniformity, of opaque substrates, epi layers, and transparent film coatings (SiC, GaN, sapphire).
- Cassette Handling
- Laser: Oblique(50mW, 405nm), Normal(85mW, 660nm)
- Spot size: 5зн x 4зн.
- Handler: Mapping,Wafer centering on chuck and FFM: OK, Wafer loading/unloading: OK
- Particle detection: smaller than 0.08зн on silicon substrate.
- Scratch: 0.1зн wide, 1~2nm deep.
- Pits and Bumps: 20зн diameter, 50Å;; deep.
- Stains: 20зн diameter, 10Å;; thick.
- can be used for both epi and bare substrate.
- can be used for Si, GaAs, Al2O3,SiC substrate.
- Substrage thickness: 350зн ~ 1,300зн.
- Air Balance system ULPA and HEPA air filter(replaced new one).
- Input Power 230V 6A 50/60Hz
- Input Air: CDA 90 PSI |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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