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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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*Nanometrics Nanospec ATLAS Thin Film Thickness Measurement |
| Model |
atlas |
Maker |
NANOMETRICS |
| Wafer Size |
8"
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Vintage |
- |
| Sell Status |
SOLD
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Tool's Condition |
Refurbishing
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| Description |
* Atlas is capable of housing up to five critical metrology technologies at one time.
- Spectroscopic reflectometer (SR)
- Spectroscopic ellipsometer (SE)
- Optical critical dimension (OCD)
- Diffraction based overlay (DBO)
- Wafer stress/bow
. Available for 200mm or 300mm wafer
. Dual Cassette Station
. LCD Touch Screen UI
. Kawasaki Robot with & Dual robot arm
. Key-Lock EMO buttons
. SECS II
. 3.5?Floppy Drive
. DVD-RW Drive
. CE Marked
. Power Requirements: 208~230V, 13A, PH 1, Freq 50/60Hz
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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