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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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N&K 1700-RT Metrology system |
| Model |
1700RT |
Maker |
N&K |
| Wafer Size |
Other
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Vintage |
2005-6 |
| Sell Status |
SELL
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Tool's Condition |
Refurbishing
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| Description |
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.
Spotsize: R = 50um, T < 400um with manual loading.
The n&k 1700-RT is designed for handling 5Ħħ or 6Ħħ square masks.
The n&k 1700-RT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system.
This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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