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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Tencor P-15 Step Height Measurement System |
| Model |
P-15 |
Maker |
KLA TENCOR |
| Wafer Size |
8"
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Vintage |
2002-8 |
| Sell Status |
SELL
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Tool's Condition |
Excellent
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| Description |
- Long Scan Profiler P-15 Measurement.
- Micro Head II SR
- Stylus Tip (Green): 2um radius
- Measurement Range: 13зн,65зн,327зн.
- Scan Length: 205mm.
- Scan Speed : 1зн ~ 25 mm/sec.
- Stylus Force: 1 ~50mg.
- Motorized X-Y stage (max sample size:254x254mm).
- Pentium III 733MHz, Ram 256MB & 19" LCD Color Monitor, Windows NT 4.0
- S/W Version : 6.41
- Utility: Vacuum.
- Power: 220V/50HZ, 4A.
- Installed in Clean-room.
- Can demonstrate any time. |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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