Metrology
 
 HOME >Tool's Information
Tool's Specification.
Tool Name Tencor P-10 Step Height Measurement System
Model P-10 Maker KLA TENCOR
Wafer Size 8" Vintage 1995-2
Sell Status SELL Tool's Condition Operational
Description - Standard Head with L(yellow) type stylus.
- Measurement Range: 13зн,300зн.
- Scan Length: 210mm.
- Scan Speed : 1зн ~ 25 mm/sec.
- Stylus Force: 1 ~100mg.
- Motorized X-Y stage (max sample size:254x254mm).
- Intel Pentium 233Mhz Ram:32MB , HDD: 2GB
- Utility: Vacuum.
- Power: 115V/50HZ, 4A.
- Installed in Clean-room.
 
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922